杜小龙

简介:

男,1966年10月生,现为中国科学院物理所研究员、博士生导师,清洁能源中心副主任,E04研究组长,挪威奥斯陆大学客座教授;1992年7月北京师范大学物理系毕业,获硕士学位;1999年2月物理所/北京理工大学毕业获博士学位;1999年9月至2002年7月在日本国立千叶大学光电子技术研究中心从事博士后研究工作。主要研究方向为氧化物半导体材料物性研究和柔性电子学器件应用以及晶体硅高效太阳能电池新工艺研究和产业开发。(http://oxidesemi.iphy.ac.cn/index.html)

主要研究方向:

1、黑硅形貌的可控制备及黑硅光电性能研究;
2,高效黑硅太阳能电池的产业应用;基于黑硅绒面的高效PERC电池及异质结电池研发;
3、氧化物薄膜的外延生长及物性研究,基于氧化物材料点缺陷的量子调控研究;
4、氧化物基柔性电子学器件研制及产业开发;

 

过去的主要工作及获得的成果:

长期从事半导体材料和器件的研究工作,创建了半导体表面/界面工程及器件应用实验室,带领团队潜心研究,在ZnO材料物性研究和器件应用以及高效晶硅太阳能电池等方向上取得了重要进展,部分成果居于国际领先水平,其中黑硅太阳能电池实现了完全自主产权的核心技术体系研发,获得了重大的技术转移转化成果。获国际国内授权专利35项,其中十九项专利已实现技术转移。作为负责人承担了973项目课题、国家自然科学基金重点项目、面上项目、国际合作项目及横向项目等20余项,经费总额近3000万元。在Advanced Materials、AELM、Small、Nanoscale、Scientific Reports、Acta Materialia、PRB/APL等本专业领域国际核心刊物上发表学术论文120余篇,总引用1500余次(@web of science)。作为Co-organizer组织了第六届国际透明导电材料会议(TCM2016, Greece,2016)(本领域主流学术会议),作为大会主席成功承办了第六届全国氧化锌学术会议。作国际学术会议邀请报告二十余次。主要工作包括:
1.   氧化锌的本征缺陷能量学的实验研究获重要进展。氧化锌本征缺陷的物性是目前ZnO研究的核心基础问题,氧空位、锌空位等本征缺陷的能级及浓度对掺杂效率、电性补偿、器件稳定性等关键性能具有重要影响。然而利用传统测量技术对点缺陷进行探测表征具有挑战性,ZnO点缺陷浓度及变化规律至今还没有在实验上被系统研究。本申请者带领团队创新性地采用同位素示踪法在用MBE法构筑的ZnO同位素异质结中系统研究了O原子和Zn原子在异质结中的自扩散行为,从实验上实现了对VO(氧空位)、VZn(锌空位)及GaZn-VZn复合点缺陷的形成能/结合能的精确测定(Phys. Rev. B 94, 195208 (2016)),澄清了+2价的VO2+是ZnO呈本征n型导电的主要来源(Phys. Rev. B 93, 235305 (2016));证实了(GaZn-VZn)-复合点缺陷是Ga掺杂ZnO薄膜中的主要补偿机制。我们发展的这一ZnO点缺陷能量学特性表征方法将帮助人们定量测定点缺陷的浓度并深刻理解ZnO中的点缺陷特性。另外,该方法还可以推广到其他氧化物材料的点缺陷研究中。
2.  在MgZnO能带工程中获得重要进展,在MgZnO日盲材料和器件上获得系列成果 带领团队采用低温生长工艺及准同质外延技术首次实现了镁组分高达创记录的55%的单一纤锌矿相的高质量MgZnO单晶薄膜的制备,带隙为4.55eV,并首次研制出高性能MgZnO日盲紫外探测器(Adv. Mater. 21, 4625 (2009))。利用这些材料研制出军事应用方面具有重大价值的日盲紫外双色(Appl. Phys. Lett. 102, 153510(2013))、多色探测器(Appl. Phys. Lett.  105, 133510(2014))。进一步利用rf-MBE法成功地在日盲W-MgZnO单晶薄膜中实现了有效的F掺杂,有效解决了日盲W-MgZnO单晶薄膜的导电性问题,相关紫外探测器性能获得了大幅提高(Sci. Rep.  5, 15516(2015))。
3.   晶硅制绒新工艺研发获得国际领先的重要成果,并实现了技术转移和产业应用在光伏市场占有绝对主导地位(90%)的晶硅太阳能电池迎来了制绒工艺的重大变革,基于金属催化化学刻蚀(MCCE)的黑硅制绒工艺将替代现有的制绒工艺,从而解决金刚线切割片的制绒难题,大力推动光伏技术的发展。本申请人带领团队在MCCE晶硅制绒工艺的研究方面取得了重大创新性成果,独创铜催化的单晶硅倒金字塔制绒工艺,并开发出可产业化单晶硅倒金字塔太阳电池工艺技术(Nanoscale 9, 907(2017);Scientific Reports 5, 10843 (2015));在多晶黑硅上也形成了一系列金刚片多晶黑硅制绒工艺及高效电池制备技术(SMALL 8, 1392(2012)),不仅解决了多晶金刚线切割新工艺带来的制绒困难的问题,同时大幅提升了电池效率。我们获得的包含单晶及多晶硅片的制绒工艺水平在国际上居于领先地位,已发表高水平论文10余篇,申请专利近20项,形成了完整的知识产权体系。基于此,我们成功地将这些工艺技术向一家上市企业进行了技术转移,并获得了联合中试项目。这些技术有望成为晶硅电池产业的新的通用制绒工艺,从而引领产业在制绒环节的重大技术进步,为光伏产业的健康发展做出实实在在的贡献。

代表性论文及专利:

1.        Yan Wang, Yaoping Liu, Lixia Yang, Wei Chen, Xiaolong Du, and Andrej Kuznetsov, Micro-structured inverted pyramid texturization of Si inspired by self-assembled Cu nanoparticles, Nanoscale 9, 907-914 (2017)
2.        Lishu Liu, Zengxia Mei, Alexander Azarov, Aihua Tang, Huili Liang, Yaoping Liu, Andrej Kuznetsov, Qi-Kun Xue and Xiaolong Du, Oxygen vacancy energetics investigated by self-diffusion measurements in isotopic ZnO heterostructures, Phys. Rev. B 93, 235305 (2016)
3.        A.Yu. Azarov, V. Venkatachalapathy, Z.X. Mei, L. Lishu, X.L. Du, E. Monakhov, A. Galeckas, Bengt G. Svensson and A.Yu. Kuznetsov, Self-diffusion measurements in isotopic heterostructures of undoped and in-situ doped ZnO: reveal of zinc vacancy energetics, Phys. Rev. B 94, 195208 (2016)
4.        Daqian Ye, Zengxia Mei, Huili Liang, Lishu liu, Yonghui Zhang, Junqiang Li, Yaoping Liu, Changzhi Gu, and Xiaolong Du, A three-terminal ultraviolet photodetector constructed on a barrier-modulated triple-layer architecture, Scientific Reports 6, 26169 (2016)
5.        Yonghui Zhang, Zengxia Mei, Shujuan Cui, Huili Liang, Yaoping Liu and Xiaolong Du: Flexible Transparent Field-Effect Diodes Fabricated at Low-Temperature with All-Oxide Materials, Adv. Electron. Mater 2, 1500486 (2016)
6.        Lixia Yang, Yaoping Liu, Wei Chen, Yan Wang, Huili Liang, Zengxia Mei, Andrej Kuznetsov and Xiaolong Du, Interface engineering of high efficiency organic-silicon heterojunction solar cells, ACS Appl. Mater. Interfaces 8, 26−30 (2016)
7.        Lishu Liu, Zengxia Mei, Yaonan Hou, huili Liang, Alexander Azarov, Vishnukanthan Venkatachalapathy, Andrej Yu Kuznetsov, and Xiao Long Du: Fluorine doping: a feasible solution to enhancing the conductivity of high-resistance wide bandgap Mg0.51Zn0.49O active components, Scientific Reports 5, 15516 (2015)
8.        Yan Wang, Lixia Yang, Yaoping Liu, Zengxia Mei, Wei Chen, Junqiang Li, Huili Liang, Andrej Kuznetsov and Xiaolong Du, Maskless inverted pyramid texturization of silicon, Scientific Reports 5, 10843 (2015)
9.        Wenxing Huo, Jin’an Shi, Zengxia Mei, Lishu Liu, Junqiang Li, Lin Gu, Xiaolong Du, Qikun Xue, High-index Cu2O (113) film on MgO (110) by molecular beam epitaxy, J. Crystal Growth 420, 32 (2015)
10.     J. Q. Li, Z. X. Mei, D. Q. Ye, H. L. Liang, A. Azarov, A. Yu. Kuznetsov, L. S. Liu, Y. P. Liu, A. L. Ji, Z. X. Cao, Q. B. Meng, and X. L. Du: Probing of defects in nitrogen doped Cu2O, Scientific Reports, 4, 7240 (2014)
11.     Lixia Yang, Yaoping Liu, Yan Wang, Xiuqing Li, Wei Chen, Yongyun Hua, Qinjie Zhang, Jianqi Fu, Huili Liang, Zengxia Mei and Xiaolong Du: Optimization of Silicon Pyramidal Emitter by Self-selective Ag-assisted Chemical Etching, RSC Advances 4, 24458 - 24462 (2014)
12.     Y.N. Hou, Z.X. Mei, H.L. Liang, C.Z. Gu, X.L. Du: Monolithic color-selective ultraviolet (266-315 nm) photodetector fabricated on wurzite MgxZn1-xO film, Appl. Phys. Lett. 105, 133510 (2014)
13.     Daqian Ye, Zengxia Mei, Huili Liang, Yulong Liu, Alexander Azarov, Andrej Kuznetsov, and Xiaolong Du: Beryllium sites in MBE-grown BeZnO alloy films, Journal of Physics D: Applied Physics. 47, 175102(2014)
14.     (Topical Review)Yaonan Hou, Zengxia Mei , and Xiaolong Du : Semiconductor ultraviolet photodetectors based on ZnO and MgxZn1-xO, Journal of Physics D: Applied Physics. 47, 283001(2014)
15.     Daqian Ye, Zengxia Mei, Huili Liang, Changzhi Gu, Alexander Azarov, Andrej Kuznetsov, Wendell Hong, Yicheng Lu, and Xiaolong Du: Enhancement-mode ZnO/Mg0.5Zn0.5O HFET on Si, Journal of Physics D: Applied Physics. 47, 255101(2014)
16.     A. Yu. Azarov, A Hallen, X. L. Du, P. Rauwel, A. Yu. Kuznetsov, and B. G. Svensson: Effect of implanted species on thermal evolution of ion-induced defects in ZnO, JOURNAL OF APPLIED PHYSICS 115, 073512 (2014)
17.     Zhanglong Liu, Xiang He, Zengxia Mei, Huili Liang, Lin Gu, Xiaofeng Duan and Xiaolong Du: Polarity-manipulation based on nanoscale structural transformation on strain. Journal of Physics D: Applied Physics. 47, 105303(2014)
18.     Y. N. Hou, Z. X. Mei, H. L. Liang, D. Q. Ye, C. Z. Gu, and X. L. Du: Dual-band MgZnO ultraviolet pohotodetector integrated with Si, Appl. Phys. Lett. 102, 153510 (2013) 
19.     Huili Liang; Zengxia mei; Yaonan Hou; Shuang Liang; Zhanglong Liu; Yaoping Liu; Junqiang Li; Xiaolong Du: Realization of W-MgZnO epitaxial growth on BeO-buffered ZnO for UV-B photodetectors, Journal of Crystal Growth 381, 6-9 (2013)
20.     Yan Wang, Yaoping Liu, Huili Liang, Zengxia Mei, Xiaolong Du: Broadband antireflection on silicon surface realized by Ag nanoparticle-patterned black silicon, Phys. Chem. Chem. Phys. 15, 2345 (2013)
21.     Yaonan Hou,Zengxia Mei,Huili Liang,Daqian Ye,Changzhi Gu, Xiaolong Du , and Yicheng Lu:Annealing Effects of Ti/Au Contact on N-MgZnO/P-Si Ultraviolet-B Photodetectors, IEEE Transactions on Electron Devices 60, 3474 (2013)
22.     Junqiang Li, Zengxia Mei,Daqian Ye, Huili Liang,Lisu Liu,Yaoping Liu, A.Yu. Azarov, Andrej Yu Kuznetsov and Xiaolong Du:Engineering of optically defect free Cu2O enabling exciton luminescence at room temperature, Optical Materials Express 3 2072 (2013)
23.     Yan Wang,Yaoping Liu , Tao Lai, Huili Liang,Zhilei li,Zengxia Mei , Fengming Zhang, Andrej Yu Kuznetsov, Xiaolong Du:Selective nano-emitter fabricated by silver assisted chemical etch-back for multicrystalline solar cells. RSC Advances 3, 15483 (2013)
24.     Xiang He, Lin Gu, Sandong Guo, Zhanglong Liu, Richeng Yu, Zengxia Mei, Xiaolong Du, Banggui Liu, Yuichi Ikuhara, and Xiaofeng Duan:Oxygen polarity and interfacial atomic arrangement in an MgxZn1-xO/C-MgO/sapphire heterostructure. Journal of Physics D: Applied Physics 16,145303 (2013)
25.     Y. P. Liu, T. Lai, H. L. Li, Y. Wang, Z. X. Mei, H. L. Liang, Z. L. Li, F. M. Zhang, W. J. Wang, A. Yu. Kuznetsov, and X. L. Du: Nanostructure formation and passivation of large-area black silicon for solar cell applications, SMALL 8, 1392-1397 (2012)
26.     Li Jun-Qiang, Mei Zeng-Xia, Ye Da-Qian, Hou Yao-Nan, Liu Yao-Ping, A. Yu. Kuznetsov and, Du Xiao-Long: Temperature dependence of Cu2O orientations in oxidation of Cu (111)/ZnO (0001) by oxygen plasma, Chin. Phys. B 21, 076401-9 (2012)
27.     Junqiang Li, Zengxia Mei, Daqian Ye, Huili Liang, Yaoping Liu, Xiaolong Du: Growth of single-crystalline Cu2O (111) film on ultrathin MgO modified -Al2O3 (0001) substrate by molecular beam epitaxy, Journal of Crystal Growth 353, 63-67(2012)
28.     Liang Shuang, Mei Zeng-Xia, and Du Xiao-Long: Modulation of electrical and optical properties of gallium-doped ZnO films by radio frequency magnetron sputtering, Chin. Phys. B 21, 067306-1-7 (2012)
29.     H.L. Liang, Z.X. Mei, Z.L. Liu, Y. Guo, A.Yu. Azarov, A.Yu. Kuznetsov, A. Hallen, and X.L. Du: Growth of single-phase Mg0.3Zn0.7O films suitable for solar-blind optical devices on RS-MgO substrates, Thin Solid Films 520, 1705 (2012)
30.     A.Yu. Azarov, A. Hallen, B.G. Svensson, X.L. Du, A.Yu. Kuznetsov: Damage accumulation and annealing behavior in high fluence implanted MgZnO, Nuclear Instruments and Methods in Physics Research B 272, 426-429 (2012)
31.     Y.N. Hou, Z.X. Mei, H.L. Liang, D.Q. Ye, S. Liang, C.Z. Gu and X.L. Du: Comparative study of n-MgZnO/p-Si ultraviolet-B photodetector performance with different device structures, Appl. Phys. Lett. 98, 263501(2011)
32.     H.L. Liang, Z.X. Mei, Q.H. Zhang, L. Gu, S. Liang, Y.N. Hou, D.Q. Ye, C.Z. Gu, R.C. Yu and X.L. Du: Interface engineering of high-Mg-content MgZnO/BeO/Si for p-n heterojunction solar-blind ultraviolet photodetectors, Appl. Phys. Lett. 98, 221902 (2011)
33.     Y P Liu, Y Guo, J Q Li, M Trunk, A Yu Kuznetsov, J B Xu, Z X Mei and X L Du: Temperature dependence of surface plasmon mediated near band-edge emission from Ag/ZnO nanorods, J. Opt. 13, 075003(2011)
34.     Y.N. Hou, Z.X. Mei, Z.L. Liu, T.C. Zhang, X.L. Du: Mg0.55Zn0.45O solar-blind ultraviolet detector with high photoresponse performance and large internal gain, Appl. Phys. Lett. 98, 103506(2011)
35.     T.C. Zhang, Z.X. Mei, A.Yu. Kuznetsov, X.L. Du: Realization of non-polar ZnO (1 1 -2 0) homoepitaxial films with atomically smooth surface by molecular beam epitaxy, Journal of Crystal Growth, 325, 93–95 (2011)
36.     Hao Zheng, Z. X. Mei, Z. Q. Zeng, Y. Z. Liu, L. W. Guo, J. F. Jia, Q. K. Xue, Z. Zhang, X. L. Du: Fabrication and characterization of high quality n-ZnO/p-GaN heterojunctionlight emission diodes, Thin Solid Films,520, 445 (2011)
37.     Xiaolong Du , Zengxia Mei, Zhanglong Liu, Yang Guo, Tianchong Zhang, Yaonan Hou, Ze Zhang, Qikun Xue and Andrej Yu Kuznetsov,Controlled Growth of High-Quality ZnO-Based Films and Fabrication of Visible-Blind and Solar-Blind Ultra-Violet Detectors, Adv. Mater. 21, 4625 (2009)
38.     T. C. Zhang, Y. Guo, Z. X. Mei, C. Z. Gu and X. L. Du: Visible-Blind Ultraviolet Photodetector Based on Double Heterojunction of n-ZnO/insulator-MgO/p-Si, Appl. Phys. Lett. 94, 113508 (2009)
39.     Pekka T. Neuvonen, Lasse Vines, Andrej Yu. Kuznetsov, Bengt G. Svensson, Xiaolong Du, Filip Tuomisto, and Anders Hallén: Interaction between Na and Li in ZnO, Appl. Phys. Lett. 95, 242111 (2009)
40.     D. Lagarde, A. Balocchi, P. Renucci, H. Carrère, T. Amand, X. Marie, Z. X. Mei, X. L. Du: Hole spin quantum beats in bulk ZnO, Phys. Rev. B 79, 045204 (2009).

目前的研究课题及展望:

目前作为项目负责人承担国家自然科学基金面上项目二项, 挪威-中国重大合作项目一项;另外还承担横向项目等其他项目若干。以上述项目为依托,正在大力推进高效晶硅太阳能电池新工艺/氧化物半导体材料及器件的研究,并与相关企业联合开发可产业化技术。

培养研究生情况:

已毕业博士研究生15名,在读博士研究生5名,在读硕士研究生3名。拟每年招收硕博连读生2~3名。

电话:

010-82649035

Email:

xldu@iphy.ac.cn